JPS639406B2 - - Google Patents
Info
- Publication number
- JPS639406B2 JPS639406B2 JP54013672A JP1367279A JPS639406B2 JP S639406 B2 JPS639406 B2 JP S639406B2 JP 54013672 A JP54013672 A JP 54013672A JP 1367279 A JP1367279 A JP 1367279A JP S639406 B2 JPS639406 B2 JP S639406B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- wafer
- upper lid
- hole
- lower lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1367279A JPS55105423A (en) | 1979-02-07 | 1979-02-07 | Piezoelectric oscillator and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1367279A JPS55105423A (en) | 1979-02-07 | 1979-02-07 | Piezoelectric oscillator and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55105423A JPS55105423A (en) | 1980-08-13 |
JPS639406B2 true JPS639406B2 (enrdf_load_stackoverflow) | 1988-02-29 |
Family
ID=11839677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1367279A Granted JPS55105423A (en) | 1979-02-07 | 1979-02-07 | Piezoelectric oscillator and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55105423A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010251943A (ja) * | 2009-04-14 | 2010-11-04 | Daishinku Corp | 圧電振動デバイス |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5298495A (en) * | 1976-02-13 | 1977-08-18 | Seiko Instr & Electronics Ltd | Manufacture of box-type crystal vibrator unit |
-
1979
- 1979-02-07 JP JP1367279A patent/JPS55105423A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS55105423A (en) | 1980-08-13 |
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