JPS63917B2 - - Google Patents
Info
- Publication number
- JPS63917B2 JPS63917B2 JP58176686A JP17668683A JPS63917B2 JP S63917 B2 JPS63917 B2 JP S63917B2 JP 58176686 A JP58176686 A JP 58176686A JP 17668683 A JP17668683 A JP 17668683A JP S63917 B2 JPS63917 B2 JP S63917B2
- Authority
- JP
- Japan
- Prior art keywords
- pair
- electrode
- thin film
- film
- metal electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 36
- 239000010408 film Substances 0.000 claims description 29
- 239000010409 thin film Substances 0.000 claims description 20
- 239000011159 matrix material Substances 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176686A JPS6074290A (ja) | 1983-09-24 | 1983-09-24 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58176686A JPS6074290A (ja) | 1983-09-24 | 1983-09-24 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6074290A JPS6074290A (ja) | 1985-04-26 |
| JPS63917B2 true JPS63917B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-09 |
Family
ID=16017950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58176686A Granted JPS6074290A (ja) | 1983-09-24 | 1983-09-24 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6074290A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR900001405B1 (ko) * | 1986-09-06 | 1990-03-09 | 주식회사 금성사 | 박막 el 표시소자 |
-
1983
- 1983-09-24 JP JP58176686A patent/JPS6074290A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6074290A (ja) | 1985-04-26 |