JPS63915B2 - - Google Patents
Info
- Publication number
- JPS63915B2 JPS63915B2 JP59058439A JP5843984A JPS63915B2 JP S63915 B2 JPS63915 B2 JP S63915B2 JP 59058439 A JP59058439 A JP 59058439A JP 5843984 A JP5843984 A JP 5843984A JP S63915 B2 JPS63915 B2 JP S63915B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- luminescent
- light emitting
- display panel
- emitting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 89
- 239000000758 substrate Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 23
- 239000010409 thin film Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 15
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 13
- 229910052717 sulfur Inorganic materials 0.000 claims description 13
- 239000011593 sulfur Substances 0.000 claims description 13
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- -1 rare earth halogen compound Chemical class 0.000 claims description 4
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 238000005401 electroluminescence Methods 0.000 description 22
- 239000011521 glass Substances 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 9
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- JGIATAMCQXIDNZ-UHFFFAOYSA-N calcium sulfide Chemical compound [Ca]=S JGIATAMCQXIDNZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058439A JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058439A JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60202684A JPS60202684A (ja) | 1985-10-14 |
| JPS63915B2 true JPS63915B2 (fr) | 1988-01-09 |
Family
ID=13084427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59058439A Granted JPS60202684A (ja) | 1984-03-28 | 1984-03-28 | 薄膜ｅｌデイスプレイパネルの発光膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60202684A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05315075A (ja) * | 1992-05-07 | 1993-11-26 | Fuji Electric Co Ltd | エレクトロルミネッセンス発光膜の成膜方法 |
| JPH0845666A (ja) * | 1995-08-11 | 1996-02-16 | Komatsu Ltd | 薄膜ｅｌ素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102983A (en) * | 1980-12-19 | 1982-06-26 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
-
1984
- 1984-03-28 JP JP59058439A patent/JPS60202684A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102983A (en) * | 1980-12-19 | 1982-06-26 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60202684A (ja) | 1985-10-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4877994A (en) | Electroluminescent device and process for producing the same | |
| JPS63915B2 (fr) | ||
| US5500103A (en) | Method for preparing thin film electro-luminescence element | |
| JPH077713B2 (ja) | 薄膜ｅｌ素子 | |
| JPS63230869A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH02148595A (ja) | 薄膜ｅｌ素子およびその製造方法 | |
| JPS58157886A (ja) | 螢光体薄膜の製造方法 | |
| JPH0265094A (ja) | 薄膜ｅｌ素子及びその製造方法 | |
| JPS61211993A (ja) | Ｅｌパネルの製造方法 | |
| JPS6047718B2 (ja) | 薄膜発光素子の製造方法 | |
| JP2555395Y2 (ja) | 薄膜ｅｌ素子の構造 | |
| JPH0458158B2 (fr) | ||
| JPH01263188A (ja) | タングステン酸カルシウム発光薄膜およびその製造方法 | |
| JPH0367490A (ja) | 硫化物蛍光体薄膜の製造方法および薄膜ｅｌ素子 | |
| JP2549319B2 (ja) | 薄膜ｅｌ素子の製造方法 | |
| WO1991003141A1 (fr) | Element electroluminescent a couche mince | |
| KR950013666B1 (ko) | 박막 el 표시소자 및 그 제조방법 | |
| JPH01241793A (ja) | 薄膜ｅｌ素子 | |
| JPS6276281A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH05242967A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH08330069A (ja) | 薄膜電場発光素子の製造方法 | |
| JPS636773A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPH0265092A (ja) | 薄膜ｅｌ素子の製造方法 | |
| JPS61253797A (ja) | エレクトロルミネセンス素子の製造方法 | |
| KR960030746A (ko) | 청색발광용 전계발광소자(eld) 및 그 제조방법 |