JPS638975B2 - - Google Patents
Info
- Publication number
- JPS638975B2 JPS638975B2 JP55087356A JP8735680A JPS638975B2 JP S638975 B2 JPS638975 B2 JP S638975B2 JP 55087356 A JP55087356 A JP 55087356A JP 8735680 A JP8735680 A JP 8735680A JP S638975 B2 JPS638975 B2 JP S638975B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- activated
- injection port
- reactor
- gas injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 17
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- 230000004913 activation Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 38
- 238000011282 treatment Methods 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8735680A JPS5712032A (en) | 1980-06-26 | 1980-06-26 | Apparatus for treatment with activated gas |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8735680A JPS5712032A (en) | 1980-06-26 | 1980-06-26 | Apparatus for treatment with activated gas |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5712032A JPS5712032A (en) | 1982-01-21 |
JPS638975B2 true JPS638975B2 (zh) | 1988-02-25 |
Family
ID=13912596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8735680A Granted JPS5712032A (en) | 1980-06-26 | 1980-06-26 | Apparatus for treatment with activated gas |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5712032A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148858U (zh) * | 1988-04-04 | 1989-10-16 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0326191A3 (en) * | 1983-02-25 | 1991-12-27 | Toyota Jidosha Kabushiki Kaisha | Apparatus and method for plasma treatment of resin material |
AU548915B2 (en) * | 1983-02-25 | 1986-01-09 | Toyota Jidosha Kabushiki Kaisha | Plasma treatment |
US4994298A (en) * | 1988-06-07 | 1991-02-19 | Biogold Inc. | Method of making a biocompatible prosthesis |
AU8141298A (en) * | 1997-06-20 | 1999-01-04 | Flowgenix Corporation | Apparatus for exposing substrates to gas-phase radicals |
US6617152B2 (en) * | 2001-09-04 | 2003-09-09 | Corning Inc | Method for creating a cell growth surface on a polymeric substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5064182A (zh) * | 1973-10-11 | 1975-05-31 |
-
1980
- 1980-06-26 JP JP8735680A patent/JPS5712032A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5064182A (zh) * | 1973-10-11 | 1975-05-31 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01148858U (zh) * | 1988-04-04 | 1989-10-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS5712032A (en) | 1982-01-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0283007B1 (en) | Chemical vapour deposition apparatus having a perforated head | |
AU747272B2 (en) | Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process | |
US6376028B1 (en) | Device and method for treating the inside surface of a plastic container with a narrow opening in a plasma enhanced process | |
US3494722A (en) | Method and apparatus for sterilizing | |
JP4116454B2 (ja) | 誘電性物体のプラズマ処理のための装置 | |
JP2004003027A (ja) | Cvdコーティング装置 | |
CN101610795B (zh) | 用于对容器进行消毒的方法 | |
KR940022720A (ko) | 플라즈마 처리장치 | |
CN104415380B (zh) | 用于在容器消毒过程中屏蔽辐射的装置 | |
KR870001100A (ko) | 여러가지 용기의 처리방법 및 장치 | |
JPS638975B2 (zh) | ||
WO1997044503A1 (en) | Method and apparatus for treating inside surfaces of containers | |
AU772766B2 (en) | Device for treating a container with microwave plasma | |
US4678644A (en) | Apparatus and method for plasma treatment of resin material | |
US20020182319A1 (en) | Method for depositing a coating on the wall of metallic containers | |
US11898241B2 (en) | Method for a treatment to deposit a barrier coating | |
JPH0322523A (ja) | 気相成長装置 | |
EP0117541B1 (en) | Apparatus for plasma treatment of resin material | |
US3964430A (en) | Semi-conductor manufacturing reactor instrument with improved reactor tube cooling | |
JPS58208326A (ja) | プラズマ処理方法 | |
EP0152511B1 (en) | Apparatus and method for plasma treatment of resin material | |
GB1098693A (en) | Sterilization of surfaces by gaseous plasmas and apparatus therefor | |
JP4610069B2 (ja) | 半導体素子の製造装置 | |
JPH0111721Y2 (zh) | ||
JPH03232981A (ja) | 基板の処理装置およびその処理方法 |