JPS638900Y2 - - Google Patents

Info

Publication number
JPS638900Y2
JPS638900Y2 JP1987061763U JP6176387U JPS638900Y2 JP S638900 Y2 JPS638900 Y2 JP S638900Y2 JP 1987061763 U JP1987061763 U JP 1987061763U JP 6176387 U JP6176387 U JP 6176387U JP S638900 Y2 JPS638900 Y2 JP S638900Y2
Authority
JP
Japan
Prior art keywords
substrate
metal
transparent substrate
metal mask
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987061763U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62179748U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987061763U priority Critical patent/JPS638900Y2/ja
Publication of JPS62179748U publication Critical patent/JPS62179748U/ja
Application granted granted Critical
Publication of JPS638900Y2 publication Critical patent/JPS638900Y2/ja
Expired legal-status Critical Current

Links

JP1987061763U 1987-04-23 1987-04-23 Expired JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061763U JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061763U JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-23 1987-04-23

Publications (2)

Publication Number Publication Date
JPS62179748U JPS62179748U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-14
JPS638900Y2 true JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-16

Family

ID=30895393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061763U Expired JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPS638900Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7635544B2 (en) 2004-09-13 2009-12-22 Hoya Corporation Transparent substrate for mask blank and mask blank

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4330443Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-07-29 1968-12-12
JPS5217815A (en) * 1975-07-30 1977-02-10 Fuji Photo Film Co Ltd Substrate and material using the same
JPS5229063U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-08-20 1977-03-01
JPS52117553A (en) * 1976-03-30 1977-10-03 Toshiba Corp Circular mask
JPS5628600Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-11-30 1981-07-07
JPS53117384A (en) * 1977-03-23 1978-10-13 Nec Corp Photoetching mask
JPS53128278A (en) * 1977-04-14 1978-11-09 Oki Electric Ind Co Ltd Production of lsi mask
JPS5421275A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Photo mask for semiconductor wafer manufacture
JPS5562736A (en) * 1978-11-01 1980-05-12 Toshiba Corp Mask material for preparation of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7635544B2 (en) 2004-09-13 2009-12-22 Hoya Corporation Transparent substrate for mask blank and mask blank

Also Published As

Publication number Publication date
JPS62179748U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-14

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