JPS6388818A - 基板収納用カセツト - Google Patents

基板収納用カセツト

Info

Publication number
JPS6388818A
JPS6388818A JP61235007A JP23500786A JPS6388818A JP S6388818 A JPS6388818 A JP S6388818A JP 61235007 A JP61235007 A JP 61235007A JP 23500786 A JP23500786 A JP 23500786A JP S6388818 A JPS6388818 A JP S6388818A
Authority
JP
Japan
Prior art keywords
cassette
holder
information card
card
outer side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61235007A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563017B2 (enExample
Inventor
Hiroshi Watanabe
寛 渡辺
Takateru Mitamura
三田村　隆輝
Masato Fujisawa
正人 藤沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61235007A priority Critical patent/JPS6388818A/ja
Publication of JPS6388818A publication Critical patent/JPS6388818A/ja
Publication of JPH0563017B2 publication Critical patent/JPH0563017B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61235007A 1986-10-02 1986-10-02 基板収納用カセツト Granted JPS6388818A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61235007A JPS6388818A (ja) 1986-10-02 1986-10-02 基板収納用カセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61235007A JPS6388818A (ja) 1986-10-02 1986-10-02 基板収納用カセツト

Publications (2)

Publication Number Publication Date
JPS6388818A true JPS6388818A (ja) 1988-04-19
JPH0563017B2 JPH0563017B2 (enExample) 1993-09-09

Family

ID=16979682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61235007A Granted JPS6388818A (ja) 1986-10-02 1986-10-02 基板収納用カセツト

Country Status (1)

Country Link
JP (1) JPS6388818A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0244333U (enExample) * 1988-09-19 1990-03-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0244333U (enExample) * 1988-09-19 1990-03-27

Also Published As

Publication number Publication date
JPH0563017B2 (enExample) 1993-09-09

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