JPS63880B2 - - Google Patents
Info
- Publication number
- JPS63880B2 JPS63880B2 JP52147868A JP14786877A JPS63880B2 JP S63880 B2 JPS63880 B2 JP S63880B2 JP 52147868 A JP52147868 A JP 52147868A JP 14786877 A JP14786877 A JP 14786877A JP S63880 B2 JPS63880 B2 JP S63880B2
- Authority
- JP
- Japan
- Prior art keywords
- time
- light
- semiconductor
- test
- memory element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 30
- 230000014759 maintenance of location Effects 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 5
- 230000000717 retained effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004904 shortening Methods 0.000 claims description 4
- 238000003860 storage Methods 0.000 description 11
- 238000007689 inspection Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 230000002950 deficient Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Techniques For Improving Reliability Of Storages (AREA)
- For Increasing The Reliability Of Semiconductor Memories (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Static Random-Access Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14786877A JPS5480039A (en) | 1977-12-08 | 1977-12-08 | Holding time test method for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14786877A JPS5480039A (en) | 1977-12-08 | 1977-12-08 | Holding time test method for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5480039A JPS5480039A (en) | 1979-06-26 |
| JPS63880B2 true JPS63880B2 (enrdf_load_stackoverflow) | 1988-01-08 |
Family
ID=15440046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14786877A Granted JPS5480039A (en) | 1977-12-08 | 1977-12-08 | Holding time test method for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5480039A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07109841B2 (ja) * | 1991-12-02 | 1995-11-22 | 東京エレクトロン株式会社 | Ｅｐｒｏｍ用ウェハプローバ |
-
1977
- 1977-12-08 JP JP14786877A patent/JPS5480039A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5480039A (en) | 1979-06-26 |
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