JPS6380847U - - Google Patents
Info
- Publication number
- JPS6380847U JPS6380847U JP17560786U JP17560786U JPS6380847U JP S6380847 U JPS6380847 U JP S6380847U JP 17560786 U JP17560786 U JP 17560786U JP 17560786 U JP17560786 U JP 17560786U JP S6380847 U JPS6380847 U JP S6380847U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- grooves
- transfer device
- wafer transfer
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 7
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17560786U JPS6380847U (hu) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17560786U JPS6380847U (hu) | 1986-11-14 | 1986-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6380847U true JPS6380847U (hu) | 1988-05-27 |
Family
ID=31115090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17560786U Pending JPS6380847U (hu) | 1986-11-14 | 1986-11-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6380847U (hu) |
-
1986
- 1986-11-14 JP JP17560786U patent/JPS6380847U/ja active Pending
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