JPS6379605U - - Google Patents

Info

Publication number
JPS6379605U
JPS6379605U JP17367786U JP17367786U JPS6379605U JP S6379605 U JPS6379605 U JP S6379605U JP 17367786 U JP17367786 U JP 17367786U JP 17367786 U JP17367786 U JP 17367786U JP S6379605 U JPS6379605 U JP S6379605U
Authority
JP
Japan
Prior art keywords
magnetic field
magnetic
magnet
generating device
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17367786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17367786U priority Critical patent/JPS6379605U/ja
Publication of JPS6379605U publication Critical patent/JPS6379605U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17367786U 1986-11-12 1986-11-12 Pending JPS6379605U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17367786U JPS6379605U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17367786U JPS6379605U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Publications (1)

Publication Number Publication Date
JPS6379605U true JPS6379605U (enrdf_load_stackoverflow) 1988-05-26

Family

ID=31111366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17367786U Pending JPS6379605U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Country Status (1)

Country Link
JP (1) JPS6379605U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS6379605U (enrdf_load_stackoverflow)
JPS6379606U (enrdf_load_stackoverflow)
JPS6379607U (enrdf_load_stackoverflow)
JPS6379608U (enrdf_load_stackoverflow)
JPS61199568U (enrdf_load_stackoverflow)
JPS6188214U (enrdf_load_stackoverflow)
JPH02118750U (enrdf_load_stackoverflow)
JPS61168164U (enrdf_load_stackoverflow)
JPH048598U (enrdf_load_stackoverflow)
JPS61168163U (enrdf_load_stackoverflow)
JPS61168166U (enrdf_load_stackoverflow)
JPH0263898U (enrdf_load_stackoverflow)
JPS59169352U (ja) スパツタリング装置の電極部構造
JPS61199031U (enrdf_load_stackoverflow)
JPS6264768U (enrdf_load_stackoverflow)
JPS59137965U (ja) マグネトロン型スパツタカソ−ド
JPS6275063U (enrdf_load_stackoverflow)
JPS6413123U (enrdf_load_stackoverflow)
JPS616962U (ja) フロツピ−デイスク装置
JPH0230694U (enrdf_load_stackoverflow)
JPH01160795U (enrdf_load_stackoverflow)
JPS61166506U (enrdf_load_stackoverflow)
JPS62103157U (enrdf_load_stackoverflow)
JPS6271996U (enrdf_load_stackoverflow)
JPS6249397U (enrdf_load_stackoverflow)