JPS61199031U - - Google Patents

Info

Publication number
JPS61199031U
JPS61199031U JP8306385U JP8306385U JPS61199031U JP S61199031 U JPS61199031 U JP S61199031U JP 8306385 U JP8306385 U JP 8306385U JP 8306385 U JP8306385 U JP 8306385U JP S61199031 U JPS61199031 U JP S61199031U
Authority
JP
Japan
Prior art keywords
target
magnetic
permanent magnet
sputtering
yoke member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8306385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8306385U priority Critical patent/JPS61199031U/ja
Publication of JPS61199031U publication Critical patent/JPS61199031U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP8306385U 1985-05-31 1985-05-31 Pending JPS61199031U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8306385U JPS61199031U (enrdf_load_stackoverflow) 1985-05-31 1985-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8306385U JPS61199031U (enrdf_load_stackoverflow) 1985-05-31 1985-05-31

Publications (1)

Publication Number Publication Date
JPS61199031U true JPS61199031U (enrdf_load_stackoverflow) 1986-12-12

Family

ID=30631349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8306385U Pending JPS61199031U (enrdf_load_stackoverflow) 1985-05-31 1985-05-31

Country Status (1)

Country Link
JP (1) JPS61199031U (enrdf_load_stackoverflow)

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