JPS61168164U - - Google Patents

Info

Publication number
JPS61168164U
JPS61168164U JP4878285U JP4878285U JPS61168164U JP S61168164 U JPS61168164 U JP S61168164U JP 4878285 U JP4878285 U JP 4878285U JP 4878285 U JP4878285 U JP 4878285U JP S61168164 U JPS61168164 U JP S61168164U
Authority
JP
Japan
Prior art keywords
target
magnetic field
magnetic
sputtering
sputtering surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4878285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4878285U priority Critical patent/JPS61168164U/ja
Publication of JPS61168164U publication Critical patent/JPS61168164U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4878285U 1985-04-02 1985-04-02 Pending JPS61168164U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4878285U JPS61168164U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4878285U JPS61168164U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Publications (1)

Publication Number Publication Date
JPS61168164U true JPS61168164U (enrdf_load_stackoverflow) 1986-10-18

Family

ID=30565361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4878285U Pending JPS61168164U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Country Status (1)

Country Link
JP (1) JPS61168164U (enrdf_load_stackoverflow)

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