JPS61168166U - - Google Patents

Info

Publication number
JPS61168166U
JPS61168166U JP4878485U JP4878485U JPS61168166U JP S61168166 U JPS61168166 U JP S61168166U JP 4878485 U JP4878485 U JP 4878485U JP 4878485 U JP4878485 U JP 4878485U JP S61168166 U JPS61168166 U JP S61168166U
Authority
JP
Japan
Prior art keywords
magnetic
magnetic field
permeability material
target
type sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4878485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4878485U priority Critical patent/JPS61168166U/ja
Publication of JPS61168166U publication Critical patent/JPS61168166U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4878485U 1985-04-02 1985-04-02 Pending JPS61168166U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4878485U JPS61168166U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4878485U JPS61168166U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Publications (1)

Publication Number Publication Date
JPS61168166U true JPS61168166U (enrdf_load_stackoverflow) 1986-10-18

Family

ID=30565365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4878485U Pending JPS61168166U (enrdf_load_stackoverflow) 1985-04-02 1985-04-02

Country Status (1)

Country Link
JP (1) JPS61168166U (enrdf_load_stackoverflow)

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