JPS6413123U - - Google Patents

Info

Publication number
JPS6413123U
JPS6413123U JP10722487U JP10722487U JPS6413123U JP S6413123 U JPS6413123 U JP S6413123U JP 10722487 U JP10722487 U JP 10722487U JP 10722487 U JP10722487 U JP 10722487U JP S6413123 U JPS6413123 U JP S6413123U
Authority
JP
Japan
Prior art keywords
metal
magnetic field
plane
sputtering device
metal target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10722487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10722487U priority Critical patent/JPS6413123U/ja
Publication of JPS6413123U publication Critical patent/JPS6413123U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP10722487U 1987-07-13 1987-07-13 Pending JPS6413123U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10722487U JPS6413123U (enrdf_load_stackoverflow) 1987-07-13 1987-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10722487U JPS6413123U (enrdf_load_stackoverflow) 1987-07-13 1987-07-13

Publications (1)

Publication Number Publication Date
JPS6413123U true JPS6413123U (enrdf_load_stackoverflow) 1989-01-24

Family

ID=31341443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10722487U Pending JPS6413123U (enrdf_load_stackoverflow) 1987-07-13 1987-07-13

Country Status (1)

Country Link
JP (1) JPS6413123U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067668A (ja) * 1983-09-21 1985-04-18 Fujitsu Ltd スパッタリング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067668A (ja) * 1983-09-21 1985-04-18 Fujitsu Ltd スパッタリング装置

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