JPS6275063U - - Google Patents
Info
- Publication number
- JPS6275063U JPS6275063U JP16564485U JP16564485U JPS6275063U JP S6275063 U JPS6275063 U JP S6275063U JP 16564485 U JP16564485 U JP 16564485U JP 16564485 U JP16564485 U JP 16564485U JP S6275063 U JPS6275063 U JP S6275063U
- Authority
- JP
- Japan
- Prior art keywords
- generating means
- field generating
- magnetic field
- target
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 3
- 239000010408 film Substances 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 230000003993 interaction Effects 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16564485U JPS6275063U (enrdf_load_stackoverflow) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16564485U JPS6275063U (enrdf_load_stackoverflow) | 1985-10-30 | 1985-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6275063U true JPS6275063U (enrdf_load_stackoverflow) | 1987-05-14 |
Family
ID=31095864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16564485U Pending JPS6275063U (enrdf_load_stackoverflow) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6275063U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000026430A1 (fr) * | 1998-10-30 | 2000-05-11 | Applied Materials Inc. | Appareil de pulverisation |
-
1985
- 1985-10-30 JP JP16564485U patent/JPS6275063U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000026430A1 (fr) * | 1998-10-30 | 2000-05-11 | Applied Materials Inc. | Appareil de pulverisation |
| US6506290B1 (en) | 1998-10-30 | 2003-01-14 | Applied Materials, Inc. | Sputtering apparatus with magnetron device |
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