JPS6378067U - - Google Patents

Info

Publication number
JPS6378067U
JPS6378067U JP17381886U JP17381886U JPS6378067U JP S6378067 U JPS6378067 U JP S6378067U JP 17381886 U JP17381886 U JP 17381886U JP 17381886 U JP17381886 U JP 17381886U JP S6378067 U JPS6378067 U JP S6378067U
Authority
JP
Japan
Prior art keywords
vapor
evaporation source
crystal resonator
vacuum
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17381886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17381886U priority Critical patent/JPS6378067U/ja
Publication of JPS6378067U publication Critical patent/JPS6378067U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17381886U 1986-11-12 1986-11-12 Pending JPS6378067U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17381886U JPS6378067U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17381886U JPS6378067U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Publications (1)

Publication Number Publication Date
JPS6378067U true JPS6378067U (enrdf_load_stackoverflow) 1988-05-24

Family

ID=31111638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17381886U Pending JPS6378067U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Country Status (1)

Country Link
JP (1) JPS6378067U (enrdf_load_stackoverflow)

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