JPH01147273U - - Google Patents

Info

Publication number
JPH01147273U
JPH01147273U JP4441588U JP4441588U JPH01147273U JP H01147273 U JPH01147273 U JP H01147273U JP 4441588 U JP4441588 U JP 4441588U JP 4441588 U JP4441588 U JP 4441588U JP H01147273 U JPH01147273 U JP H01147273U
Authority
JP
Japan
Prior art keywords
growth chamber
substrate holder
molecular beam
beam epitaxy
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4441588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057253Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4441588U priority Critical patent/JPH057253Y2/ja
Publication of JPH01147273U publication Critical patent/JPH01147273U/ja
Application granted granted Critical
Publication of JPH057253Y2 publication Critical patent/JPH057253Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4441588U 1988-03-31 1988-03-31 Expired - Lifetime JPH057253Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4441588U JPH057253Y2 (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4441588U JPH057253Y2 (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Publications (2)

Publication Number Publication Date
JPH01147273U true JPH01147273U (enrdf_load_stackoverflow) 1989-10-11
JPH057253Y2 JPH057253Y2 (enrdf_load_stackoverflow) 1993-02-24

Family

ID=31270774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4441588U Expired - Lifetime JPH057253Y2 (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH057253Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024145030A (ja) 2023-03-31 2024-10-15 ルネサスエレクトロニクス株式会社 半導体装置、時間計測方法及び時間計測プログラム

Also Published As

Publication number Publication date
JPH057253Y2 (enrdf_load_stackoverflow) 1993-02-24

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