JPH0447299U - - Google Patents

Info

Publication number
JPH0447299U
JPH0447299U JP8990090U JP8990090U JPH0447299U JP H0447299 U JPH0447299 U JP H0447299U JP 8990090 U JP8990090 U JP 8990090U JP 8990090 U JP8990090 U JP 8990090U JP H0447299 U JPH0447299 U JP H0447299U
Authority
JP
Japan
Prior art keywords
evaporation
source
laser light
target
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8990090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8990090U priority Critical patent/JPH0447299U/ja
Publication of JPH0447299U publication Critical patent/JPH0447299U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
JP8990090U 1990-08-27 1990-08-27 Pending JPH0447299U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8990090U JPH0447299U (enrdf_load_stackoverflow) 1990-08-27 1990-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8990090U JPH0447299U (enrdf_load_stackoverflow) 1990-08-27 1990-08-27

Publications (1)

Publication Number Publication Date
JPH0447299U true JPH0447299U (enrdf_load_stackoverflow) 1992-04-22

Family

ID=31824216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8990090U Pending JPH0447299U (enrdf_load_stackoverflow) 1990-08-27 1990-08-27

Country Status (1)

Country Link
JP (1) JPH0447299U (enrdf_load_stackoverflow)

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