JPS6447859A - Vapor deposition method with laser - Google Patents

Vapor deposition method with laser

Info

Publication number
JPS6447859A
JPS6447859A JP20194787A JP20194787A JPS6447859A JP S6447859 A JPS6447859 A JP S6447859A JP 20194787 A JP20194787 A JP 20194787A JP 20194787 A JP20194787 A JP 20194787A JP S6447859 A JPS6447859 A JP S6447859A
Authority
JP
Japan
Prior art keywords
evaporating
divided
sources
laser beams
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20194787A
Other languages
Japanese (ja)
Inventor
Kyoji Tachikawa
Kiyokazu Nakada
Shigechika Kosuge
Moriaki Ono
Itaru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
JFE Engineering Corp
Original Assignee
Tokai University
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, NKK Corp, Nippon Kokan Ltd filed Critical Tokai University
Priority to JP20194787A priority Critical patent/JPS6447859A/en
Publication of JPS6447859A publication Critical patent/JPS6447859A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a bar shape or other shape to form an evaporating source and by separately projecting laser beams on the divided parts of the formed evaporating source. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in the longitudinal direction to form an evaporating source 2 in a bar or cylinder shape. Laser beams generated from a laser beam generator are divided with partial transmitting mirrors 7a, 7b and a total reflecting mirror 7c and the divided laser beams are separately and simultaneously projected on the evaporating sources 2a-2c. Particles evaporated from the sources 2a-2c are deposited on a substrate 3. Thus, a dense film of a ceramic superconductive material can be effectively formed.
JP20194787A 1987-08-14 1987-08-14 Vapor deposition method with laser Pending JPS6447859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20194787A JPS6447859A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20194787A JPS6447859A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Publications (1)

Publication Number Publication Date
JPS6447859A true JPS6447859A (en) 1989-02-22

Family

ID=16449413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20194787A Pending JPS6447859A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Country Status (1)

Country Link
JP (1) JPS6447859A (en)

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