JPS5692197A - Production of oriented crystal thin film - Google Patents
Production of oriented crystal thin filmInfo
- Publication number
- JPS5692197A JPS5692197A JP16691279A JP16691279A JPS5692197A JP S5692197 A JPS5692197 A JP S5692197A JP 16691279 A JP16691279 A JP 16691279A JP 16691279 A JP16691279 A JP 16691279A JP S5692197 A JPS5692197 A JP S5692197A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- crystal thin
- laser
- light
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To form an oriented crystal thin film on a crystalline or amorphous substrate by making use of the energy of electromagnetic waves and the fine periods of interference patterns.
CONSTITUTION: A laser beam of 5,145Å wavelength emitted from an Ar ion laser 11 is divided into two directions by a beam spliter 12. These are superposed on the surface of a quartz substrate 15 through the light lead-in windows 17 attached to a vacuum vessel 14 by controlling optical paths with mirrors 13. There is the relation d=λ/2sinθ between the period (d) of the interference fringes of the light of this case and the angle 2θ assumed by the two beams (λ denotes the wavelength of the light). Since 2θ=60° was employed, the period was d=0.51μm. Next, a vapor source 16 containing Si was operated to supply Si vapor and allow it to deposit on the substrate 15. It was confirmed by a reflecting electron diffraction method that in the case of laser output 7W the formed thin film 18 is a good single crystal thin film except the peipheral part of the laser irradiated region.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16691279A JPS6029680B2 (en) | 1979-12-24 | 1979-12-24 | Method for producing oriented crystalline thin films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16691279A JPS6029680B2 (en) | 1979-12-24 | 1979-12-24 | Method for producing oriented crystalline thin films |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5692197A true JPS5692197A (en) | 1981-07-25 |
JPS6029680B2 JPS6029680B2 (en) | 1985-07-11 |
Family
ID=15839937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16691279A Expired JPS6029680B2 (en) | 1979-12-24 | 1979-12-24 | Method for producing oriented crystalline thin films |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6029680B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS623089A (en) * | 1985-06-27 | 1987-01-09 | Nippon Kogaku Kk <Nikon> | Production apparatus for semiconductor |
JPS6311592A (en) * | 1986-07-02 | 1988-01-19 | Matsushita Electronics Corp | Production of semiconductor device |
JPH0621877U (en) * | 1992-04-02 | 1994-03-22 | 村田機械株式会社 | Robot hand |
-
1979
- 1979-12-24 JP JP16691279A patent/JPS6029680B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS623089A (en) * | 1985-06-27 | 1987-01-09 | Nippon Kogaku Kk <Nikon> | Production apparatus for semiconductor |
JPS6311592A (en) * | 1986-07-02 | 1988-01-19 | Matsushita Electronics Corp | Production of semiconductor device |
JPH0621877U (en) * | 1992-04-02 | 1994-03-22 | 村田機械株式会社 | Robot hand |
Also Published As
Publication number | Publication date |
---|---|
JPS6029680B2 (en) | 1985-07-11 |
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