JPH0621877U - Robot hand - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] The projecting piece of the carrier, which is the object to be conveyed, is reliably supported in a stable state by the article support table at the tip of the second swing arm of the robot hand. [Structure] Even when the left and right article holders 67 are not in a parallel state, the article support base 69 is positioned directly below the overhanging piece 52 of the carrier 51, and thereafter, when the overhanging piece 52 is supported by the article support stand 69, the article supporting stand 69 is placed inside. If the article support base 69 in the projecting state hits the carrier 51 and retracts outwards against the spring 91, the article support base 69 is surely positioned directly below the overhanging piece 52, and The overhanging piece 52 can be reliably supported in a stable state.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 This invention relates to a robot hand.

[0002]

[Robot hand already developed]

 The applicant has already applied for the robot hand as follows. That is, the base, a pair of left and right pillars provided on the base so as to be close to and away from each other, and the upper and lower facing portions of these pillars are oscillated via a pivot having a common axis centered in the left-right direction. A first swing arm that is movably provided, and a second swing arm that is swingably provided on the side of the first swing arm facing the free end through a pivot shaft with a common axis centered in the left-right direction. A moving arm, an article holder that is swingably provided on the side of the second swinging arm facing the free ends of the second swinging arm via a pivot having a common axis centered in the left-right direction, and the swinging of the first swinging arm. A second swing arm and a swing control device for orienting the article holder in a predetermined direction in association with movement, wherein the article holder is a main body and an article provided on the main body. It is one that has a support base (see Japanese Patent Application No. 3-104822).

[0003]

[Operation of the robot hand]

 The robot hand has the following functions. After extending the first swing arm and the second swing arm to position the article support table below the left and right overhanging pieces formed on the left and right portions of the case (for example, a carrier for storing a semiconductor wafer), The pillars that were separated from each other are brought close to each other, and the article support is positioned directly below the projecting piece of the case. After that, the base is lifted up and the projecting piece is supported by the article support base, and then the first swing arm and the second swing arm are folded in a reverse shape so as to be in a vertical state. The case can be brought to the table, and the case can be taken off from the base by the reverse operation.

[0004]

[Problems of the Robot Hand] The robot hand has the following problems. That is, since the first swing arm and the second swing arm are both cantilevered, the left and right article holders can always be held in parallel with each other at a constant interval even if they are manufactured with high precision. In some cases, it may be difficult, and as a result, the position of the article support base may be misaligned with the setting position directly below the projecting piece of the case.Therefore, the article support platform cannot reliably support the case projecting piece in a stable state. There was a problem of fear. In particular, in the case where two cases are lined up in the front-rear direction in order to simultaneously transfer two cases arranged side by side in the front-rear direction, the entire length of the article holders in the front-rear direction is The problem was even greater as it became longer. However, the present invention is not applied or implemented only to the robot hand, and, in short, can be vertically swung in synchronization with a common horizontal axis center and can be moved toward and away from each other. It goes without saying that the present invention can be applied and implemented in a robot hand having a pair of right and left swing arms.

[0005]

[Means for Solving the Problems]

 This device adopts the following means in order to solve the above problems. The invention is a pair of left and right swing arms that can be vertically swung in synchronization about a common horizontal axis, and can be moved closer to and away from each other, and the free ends of these swing arms. And an article holder provided so as to be swingable through a pivot having an axis centered in the left-right direction. The article support base is biased in the direction of approaching each other.

[0006]

[Function of the device]

 This device has the following actions. Even when the left and right article holders are not parallel, place the article support base directly under the overhanging piece of the case, and then when supporting the overhanging piece with the article support stand, the article support stand protruding inward will be attached to the case. If the spring is pushed against the spring and retracted outward, the article support can be reliably positioned immediately below the projecting piece, and the projecting piece of the case can be reliably supported in a stable state. In short, by retreating the article support table to the outside, it is possible to absorb the error in the spacing that occurs when the left and right article holders are not in the parallel state.

[0007]

【Example】

 The present invention will be described below based on an embodiment shown in the drawings. In this specification, the front means the upper side of FIG. 3, the rear means the lower side of FIG. 3, the left means the left side of FIG. 1, and the right means the right side of FIG.

Inside the hollow base 56 of the robot hand 54, a left / right moving block 58 is provided by an actuating device 57 so as to be close to and away from each other. Hollow pillars 59 are erected on the left and right moving blocks 58, and the pillars 59 project upward through slits formed on the base 56. A pivot 60 having an axis centered in the left-right direction is rotatably provided at the upper end of the pillar 59, and the hollow first swinging rock is positioned on the inside of the pillar 59 (opposing side) on the pivot 60. The bases of the arms 61 are fixed, and pivot shafts 63 having their axes centered in the left-right direction are rotatably provided at the free ends of the first swing arms 61. The bases of the second swinging arms 64, which are hollow, are fixed so as to be located inside, and pivot shafts 66 with their axes oriented in the left-right direction are rotatably provided at the free ends of these second swinging arms 64. The article holders 67 are fixed to the pivots 66 so as to be located inside the second swing arm 64. The article holders 67 are provided on the main body 70 and on the main body 70. And the article support piece 68 facing the The bearing piece 68, and two articles bearing blocks 69 before and after supporting the overhanging piece 52 of the object to be conveyed der Ru carrier 51 is provided as follows. That is, the article support base 69 uses the long hole 88 formed in the article support base 69 in the left-right direction to move left and right on the vertical shaft 89 standing on the article support piece 68 without play in the front-rear direction. It is freely and horizontally swingable. Further, the article support base 69 is guided by the front and rear guide rails 90 so as to be movable left and right and horizontally swingable as described above, but is designed so as not to move in the vertical direction. The article support table 69 is urged by the spring 91 toward the other article support table 69, in other words, in a direction in which they approach each other.

The distance between the pivot 60 and the pivot 63 is equal to the distance between the pivot 63 and the pivot 66. Further, the left and right pivots 60 are common axes, the left and right pivots 63 are common axes, and the left and right pivots 66 are also common axes.

The robot hand 54 is a swing control device for interlocking with the swing of the first swing arm 61 so that the second swing arm 64 and the article support piece 68 of the article holder 67 are oriented in a predetermined direction. Has 72. The swing control device 72 has a lower portion of the pillar 59 in a skewered shape to allow the lateral movement of the pillar 59, and has a spline rotatably provided inside the hollow base 56. It has a shaft 73, and this rotating shaft 73 is adapted to be rotated by a motor 74 which is rotatable in forward and reverse directions. A wheel 76 rotatably provided on each of the columns 59 is spline-connected to the rotary shaft 73, and a wheel 77 is fitted to the pivot shaft 60 so as to be paired with the wheel 76. An endless belt 78 made of a chain or the like is stretched around the wheel 76.

A fixed wheel 80 is fixed to the upper end of the pillar 59 so as to be coaxial with the pivot 60 and located inside the first swing arm 61. A wheel 81 is fitted onto the pivot 63 so as to form a pair with the fixed wheel 80, and an endless band 82 made of a chain or the like is stretched between the wheel 81 and the fixed wheel 80.

A fixed wheel 84 is fixed to the free end of the first swing arm 61 so as to be coaxial with the pivot 63 and located inside the second swing arm 64. A wheel 85 is fitted and fixed to the pivot 66 so as to form a pair with the fixed wheel 84, and an endless band 86 made of a chain or the like is stretched between the wheel 85 and the fixed wheel 84. The fixed wheel 80 and the wheel 85 have the same size, and the wheel 81 and the fixed wheel 84 have a size half that of the fixed wheel 80.

The article support piece 68 itself is horizontal when the first swing arm 61 and the second swing arm 64 overlap the pillar 59. With the above configuration, when the first swing arm 61 swings by a predetermined angle θ, the second swing arm 64 swings 2θ in the opposite direction with respect to the first swing arm 61, and The article holder 67 swings by θ with respect to the swing arm 64 in the opposite direction. As a result, the article support piece 68 of the article holder 67 always maintains a horizontal state. The operation itself of the robot hand of this embodiment is similar to that of the previously developed robot hand.

[0014]

[Effect of device]

 The present invention has the following effects due to the configuration as described above. Even when the left and right article holders are not in parallel state, place the article support base just below the overhanging piece of the case, and then when supporting the overhanging piece by the article support stand, the article support stand that protrudes inward is placed in the case. If the spring is pushed against the spring and outwardly retracted, the article support can be reliably positioned directly below the projecting piece, and the projecting piece of the case can be supported in a stable state.

[Brief description of drawings]

FIG. 1 is a partially crushed perspective view showing an embodiment of the present invention.

FIG. 2 is a developed elevational view showing the mechanism of the swing control device.

FIG. 3 is a partially crushed plan view of the example.

FIG. 4 is a side view of the partially crushed portion of FIG.

5 is an enlarged view of part A of FIG.

6 is a sectional view taken along line VI-VI of FIG.

7 is a cross-sectional view taken along the line VII-VII in FIG. 6 with the middle omitted.

[Explanation of symbols]

 54 robot hand 64 second swing arm 66 pivot 67 article holder 68 article support piece 69 article support base 70 main body

Claims (3)

[Scope of utility model registration request] 1. A pair of left and right swing arms that are vertically swingable in synchronization about a common horizontal axis center and that are movable toward and away from each other, and shafts at the free ends of these swing arms. An article holder provided so as to be swingable via a pivot having its center in the left-right direction, wherein the article holder is movable from the body to the left-right direction and is biased to each other by a spring. A robot hand having an article support urged in a matching direction. 2. The robot hand according to claim 1, wherein each of the article holders is provided with two article support bases. 3. A base, a pair of left and right columns provided on the base so as to be able to approach and separate from each other, and a pivot having a common axis centered in the left-right direction on the upper end facing side of these columns. And a second swinging arm that is swingably provided on the side of the first swinging arm facing the free ends of the first swinging arm via a pivot shaft with a common axis centered in the left-right direction. A swing arm, an article holder that is swingably provided on the side of the second swing arm facing the free ends of the second swing arm via a pivot having a common axis in the left-right direction, and the first swing arm. A second swing arm and a swing control device for setting the article holder in a predetermined direction in association with swing, each of the article holders has a main body,
A robot hand having a body support movably provided on the main body and urged in a direction in which the springs lean toward each other.