JPS6447858A - Vapor deposition method with laser - Google Patents

Vapor deposition method with laser

Info

Publication number
JPS6447858A
JPS6447858A JP62201946A JP20194687A JPS6447858A JP S6447858 A JPS6447858 A JP S6447858A JP 62201946 A JP62201946 A JP 62201946A JP 20194687 A JP20194687 A JP 20194687A JP S6447858 A JPS6447858 A JP S6447858A
Authority
JP
Japan
Prior art keywords
source
evaporating
sources
divided
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62201946A
Other languages
Japanese (ja)
Inventor
Kyoji Tachikawa
Kiyokazu Nakada
Shigechika Kosuge
Moriaki Ono
Itaru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
JFE Engineering Corp
Original Assignee
Tokai University
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, NKK Corp, Nippon Kokan Ltd filed Critical Tokai University
Priority to JP62201946A priority Critical patent/JPS6447858A/en
Publication of JPS6447858A publication Critical patent/JPS6447858A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a column shape to form an evaporating source and by projecting laser beams on the source while rotating the source at a prescribed peripheral speed. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in a direction parallel to their axes to form an integrated evaporating source 2 in a column shape. The source 2 is rotated on its axis at a prescribed peripheral speed. Laser beams from a laser beam generating source are reflected by a mirror 7 and projected on the rotating source 2. The surfaces of the sources 2a-2c are separately evaporated and fine particle deposit together on the surface of a substrate 3. Thus, a film of a ceramic superconductive material, carbonitride, etc., can be effectively formed.
JP62201946A 1987-08-14 1987-08-14 Vapor deposition method with laser Pending JPS6447858A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62201946A JPS6447858A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201946A JPS6447858A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Publications (1)

Publication Number Publication Date
JPS6447858A true JPS6447858A (en) 1989-02-22

Family

ID=16449395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62201946A Pending JPS6447858A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Country Status (1)

Country Link
JP (1) JPS6447858A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096847A (en) * 1989-12-02 1992-03-17 Samsung Electronics Co., Ltd. Method making an ultra high density dram cell with stacked capacitor
US5162253A (en) * 1991-04-05 1992-11-10 Nec Corporation Method of producing capacitive element integrated circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096847A (en) * 1989-12-02 1992-03-17 Samsung Electronics Co., Ltd. Method making an ultra high density dram cell with stacked capacitor
US5162253A (en) * 1991-04-05 1992-11-10 Nec Corporation Method of producing capacitive element integrated circuit

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