JPS6447857A - Vapor deposition method with laser - Google Patents

Vapor deposition method with laser

Info

Publication number
JPS6447857A
JPS6447857A JP20194587A JP20194587A JPS6447857A JP S6447857 A JPS6447857 A JP S6447857A JP 20194587 A JP20194587 A JP 20194587A JP 20194587 A JP20194587 A JP 20194587A JP S6447857 A JPS6447857 A JP S6447857A
Authority
JP
Japan
Prior art keywords
source
evaporating
sources
laser beams
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20194587A
Other languages
Japanese (ja)
Inventor
Kyoji Tachikawa
Kiyokazu Nakada
Shigechika Kosuge
Moriaki Ono
Itaru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai University
JFE Engineering Corp
Original Assignee
Tokai University
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai University, NKK Corp, Nippon Kokan Ltd filed Critical Tokai University
Priority to JP20194587A priority Critical patent/JPS6447857A/en
Publication of JPS6447857A publication Critical patent/JPS6447857A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Lasers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a bar shape or other shape to form an evaporating source and by projecting laser beams on the source while vibrating the beams. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in the longitudinal direction to form an evaporating source 2 in a bar or cylinder shape. Laser beams from a laser beam generating source are projected on a vibrating mirror 7 and the mirror 7 is vibrated in the axial direction of the formed evaporating source 2. By the vibration, the laser beams are continuously moved back and forth along the source 2 and projected on the source 2 over the nearly full length. The surfaces of the sources 2a-2c are separately evaporated and fine particles deposit together on the surface of a substrate 3 to form a dense film of a compd. oxide superconductive material, etc.
JP20194587A 1987-08-14 1987-08-14 Vapor deposition method with laser Pending JPS6447857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20194587A JPS6447857A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20194587A JPS6447857A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Publications (1)

Publication Number Publication Date
JPS6447857A true JPS6447857A (en) 1989-02-22

Family

ID=16449377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20194587A Pending JPS6447857A (en) 1987-08-14 1987-08-14 Vapor deposition method with laser

Country Status (1)

Country Link
JP (1) JPS6447857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411772A (en) * 1994-01-25 1995-05-02 Rockwell International Corporation Method of laser ablation for uniform thin film deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411772A (en) * 1994-01-25 1995-05-02 Rockwell International Corporation Method of laser ablation for uniform thin film deposition

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