JPS6190853U - - Google Patents
Info
- Publication number
- JPS6190853U JPS6190853U JP17612184U JP17612184U JPS6190853U JP S6190853 U JPS6190853 U JP S6190853U JP 17612184 U JP17612184 U JP 17612184U JP 17612184 U JP17612184 U JP 17612184U JP S6190853 U JPS6190853 U JP S6190853U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- film forming
- vacuum film
- forming apparatus
- hollow member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612184U JPS6190853U (enrdf_load_stackoverflow) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612184U JPS6190853U (enrdf_load_stackoverflow) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190853U true JPS6190853U (enrdf_load_stackoverflow) | 1986-06-12 |
Family
ID=30733718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612184U Pending JPS6190853U (enrdf_load_stackoverflow) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190853U (enrdf_load_stackoverflow) |
-
1984
- 1984-11-20 JP JP17612184U patent/JPS6190853U/ja active Pending
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