JPH0351859U - - Google Patents
Info
- Publication number
- JPH0351859U JPH0351859U JP11312289U JP11312289U JPH0351859U JP H0351859 U JPH0351859 U JP H0351859U JP 11312289 U JP11312289 U JP 11312289U JP 11312289 U JP11312289 U JP 11312289U JP H0351859 U JPH0351859 U JP H0351859U
- Authority
- JP
- Japan
- Prior art keywords
- cleavage
- semiconductor
- housed
- chamber
- front chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000003776 cleavage reaction Methods 0.000 claims description 6
- 230000007017 scission Effects 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 230000003449 preventive effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11312289U JPH0351859U (enrdf_load_stackoverflow) | 1989-09-26 | 1989-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11312289U JPH0351859U (enrdf_load_stackoverflow) | 1989-09-26 | 1989-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0351859U true JPH0351859U (enrdf_load_stackoverflow) | 1991-05-20 |
Family
ID=31661547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11312289U Pending JPH0351859U (enrdf_load_stackoverflow) | 1989-09-26 | 1989-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351859U (enrdf_load_stackoverflow) |
-
1989
- 1989-09-26 JP JP11312289U patent/JPH0351859U/ja active Pending
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