JPS6336029U - - Google Patents

Info

Publication number
JPS6336029U
JPS6336029U JP12946086U JP12946086U JPS6336029U JP S6336029 U JPS6336029 U JP S6336029U JP 12946086 U JP12946086 U JP 12946086U JP 12946086 U JP12946086 U JP 12946086U JP S6336029 U JPS6336029 U JP S6336029U
Authority
JP
Japan
Prior art keywords
transparent material
flange
cylinder
position confirmation
shutter position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12946086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12946086U priority Critical patent/JPS6336029U/ja
Publication of JPS6336029U publication Critical patent/JPS6336029U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP12946086U 1986-08-27 1986-08-27 Pending JPS6336029U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12946086U JPS6336029U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12946086U JPS6336029U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6336029U true JPS6336029U (enrdf_load_stackoverflow) 1988-03-08

Family

ID=31026048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12946086U Pending JPS6336029U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6336029U (enrdf_load_stackoverflow)

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