JPS6275070U - - Google Patents

Info

Publication number
JPS6275070U
JPS6275070U JP16860985U JP16860985U JPS6275070U JP S6275070 U JPS6275070 U JP S6275070U JP 16860985 U JP16860985 U JP 16860985U JP 16860985 U JP16860985 U JP 16860985U JP S6275070 U JPS6275070 U JP S6275070U
Authority
JP
Japan
Prior art keywords
opening
shroud
molecular beam
beam epitaxy
epitaxy apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16860985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057250Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16860985U priority Critical patent/JPH057250Y2/ja
Publication of JPS6275070U publication Critical patent/JPS6275070U/ja
Application granted granted Critical
Publication of JPH057250Y2 publication Critical patent/JPH057250Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP16860985U 1985-10-30 1985-10-30 Expired - Lifetime JPH057250Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16860985U JPH057250Y2 (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16860985U JPH057250Y2 (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Publications (2)

Publication Number Publication Date
JPS6275070U true JPS6275070U (enrdf_load_stackoverflow) 1987-05-14
JPH057250Y2 JPH057250Y2 (enrdf_load_stackoverflow) 1993-02-24

Family

ID=31101643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16860985U Expired - Lifetime JPH057250Y2 (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Country Status (1)

Country Link
JP (1) JPH057250Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH057250Y2 (enrdf_load_stackoverflow) 1993-02-24

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