JPS6275070U - - Google Patents
Info
- Publication number
- JPS6275070U JPS6275070U JP16860985U JP16860985U JPS6275070U JP S6275070 U JPS6275070 U JP S6275070U JP 16860985 U JP16860985 U JP 16860985U JP 16860985 U JP16860985 U JP 16860985U JP S6275070 U JPS6275070 U JP S6275070U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- shroud
- molecular beam
- beam epitaxy
- epitaxy apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例による分子線エピ
タキシ装置を示す断面図、第２図はこの考案の他
の実施例を示すストツパの斜視図、第３図は従来
の分子線エピタキシ装置を示す断面図である。
１……ルツボ、２……ヒーター線、３……支持
棒、４……シヤツタ、５ａ，５ｂ……シユラウド
、６ａ，６ｂ……ストツパ、７……ストツパ、７
ａ……鍔部。なお、図中、同一符号は同一または
相当部分を示す。
Fig. 1 is a sectional view showing a molecular beam epitaxy apparatus according to one embodiment of this invention, Fig. 2 is a perspective view of a stopper showing another embodiment of this invention, and Fig. 3 is a conventional molecular beam epitaxy apparatus. FIG. 1... Crucible, 2... Heater wire, 3... Support rod, 4... Shutter, 5a, 5b... Shroud, 6a, 6b... Stopper, 7... Stopper, 7
a... Tsuba. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
設し、該シユラウド開口部周辺に突起状のストツ
パを設けたことを特徴とする分子線エピタキシ装
置。 A molecular beam epitaxy apparatus characterized in that a deposition source crucible is disposed within an opening of a cooling shroud, and a protruding stopper is provided around the shroud opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (en) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16860985U JPH057250Y2 (en) | 1985-10-30 | 1985-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275070U true JPS6275070U (en) | 1987-05-14 |
| JPH057250Y2 JPH057250Y2 (en) | 1993-02-24 |
Family
ID=31101643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16860985U Expired - Lifetime JPH057250Y2 (en) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057250Y2 (en) |
-
1985
- 1985-10-30 JP JP16860985U patent/JPH057250Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057250Y2 (en) | 1993-02-24 |