JPH01168550U - - Google Patents

Info

Publication number
JPH01168550U
JPH01168550U JP6611088U JP6611088U JPH01168550U JP H01168550 U JPH01168550 U JP H01168550U JP 6611088 U JP6611088 U JP 6611088U JP 6611088 U JP6611088 U JP 6611088U JP H01168550 U JPH01168550 U JP H01168550U
Authority
JP
Japan
Prior art keywords
growth chamber
vacuum
forming apparatus
film forming
stray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6611088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6611088U priority Critical patent/JPH01168550U/ja
Publication of JPH01168550U publication Critical patent/JPH01168550U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP6611088U 1988-05-18 1988-05-18 Pending JPH01168550U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6611088U JPH01168550U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6611088U JPH01168550U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Publications (1)

Publication Number Publication Date
JPH01168550U true JPH01168550U (enrdf_load_stackoverflow) 1989-11-28

Family

ID=31291526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6611088U Pending JPH01168550U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Country Status (1)

Country Link
JP (1) JPH01168550U (enrdf_load_stackoverflow)

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