JPS62129059U - - Google Patents

Info

Publication number
JPS62129059U
JPS62129059U JP1558086U JP1558086U JPS62129059U JP S62129059 U JPS62129059 U JP S62129059U JP 1558086 U JP1558086 U JP 1558086U JP 1558086 U JP1558086 U JP 1558086U JP S62129059 U JPS62129059 U JP S62129059U
Authority
JP
Japan
Prior art keywords
evaporated
bell gear
thin film
evaporation source
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1558086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1558086U priority Critical patent/JPS62129059U/ja
Publication of JPS62129059U publication Critical patent/JPS62129059U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1558086U 1986-02-05 1986-02-05 Pending JPS62129059U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1558086U JPS62129059U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1558086U JPS62129059U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Publications (1)

Publication Number Publication Date
JPS62129059U true JPS62129059U (enrdf_load_stackoverflow) 1987-08-15

Family

ID=30806641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1558086U Pending JPS62129059U (enrdf_load_stackoverflow) 1986-02-05 1986-02-05

Country Status (1)

Country Link
JP (1) JPS62129059U (enrdf_load_stackoverflow)

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