JPS637463B2 - - Google Patents

Info

Publication number
JPS637463B2
JPS637463B2 JP56103529A JP10352981A JPS637463B2 JP S637463 B2 JPS637463 B2 JP S637463B2 JP 56103529 A JP56103529 A JP 56103529A JP 10352981 A JP10352981 A JP 10352981A JP S637463 B2 JPS637463 B2 JP S637463B2
Authority
JP
Japan
Prior art keywords
film
insulating film
films
opening
metal wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56103529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS586149A (ja
Inventor
Kunio Aomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP10352981A priority Critical patent/JPS586149A/ja
Publication of JPS586149A publication Critical patent/JPS586149A/ja
Publication of JPS637463B2 publication Critical patent/JPS637463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP10352981A 1981-07-02 1981-07-02 半導体装置の製造方法 Granted JPS586149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10352981A JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10352981A JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS586149A JPS586149A (ja) 1983-01-13
JPS637463B2 true JPS637463B2 (enrdf_load_stackoverflow) 1988-02-17

Family

ID=14356416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10352981A Granted JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS586149A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2586434B2 (ja) * 1987-08-21 1997-02-26 株式会社デンソー 磁気検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156375A (en) * 1976-06-22 1977-12-26 Nippon Electric Co Method of producing multilayer circuit substrate

Also Published As

Publication number Publication date
JPS586149A (ja) 1983-01-13

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