JPS6371536U

JPS6371536U -

Info

Publication number: JPS6371536U
Application number: JP16722686U
Authority: JP
Priority date: 1986-10-30
Filing date: 1986-10-30
Publication date: 1988-05-13

Description

[Brief explanation of the drawing]

第１図は本考案の第１の実施例を示すプローブ
カードの断面図、第２図は従来のプローブカード
の一構成例を示す平面図、第３図は第２図の断面
図、第４図は従来のプローブカードのプローブ針
と半導体素子電極部との接続状態を示す平面図、
第５図は従来のプローブ針と半導体素子との接続
部を示す断面図、第６図は従来の他のプローブ針
と半導体素子との接続部を示す平面図、第７図は
本考案の第１の実施例のプローブ針と電極部との
接続状態を示す平面図、第８図は本考案の第２の
実施例を示すプローブカードの断面図である。３１，５０……カード本体、３２……開口部、
３４……配線パターン、３５，５１……プローブ
針、３５―１，５１―１……第１の節部、３５―
２……針先端部、３５―３，５１―２……第２の
節部、３８……ウエハ、３９……半導体素子、４
０……電極部。 FIG. 1 is a sectional view of a probe card showing a first embodiment of the present invention, FIG. 2 is a plan view showing an example of the configuration of a conventional probe card, FIG. 3 is a sectional view of FIG. 2, and FIG. The figure is a plan view showing the connection state between the probe needle of a conventional probe card and the semiconductor element electrode part.
FIG. 5 is a cross-sectional view showing a connection between a conventional probe needle and a semiconductor element, FIG. 6 is a plan view showing another conventional connection between a probe needle and a semiconductor element, and FIG. 7 is a cross-sectional view showing a connection between a conventional probe needle and a semiconductor element. FIG. 8 is a plan view showing the state of connection between the probe needle and the electrode portion of the first embodiment, and FIG. 8 is a sectional view of a probe card showing the second embodiment of the present invention. 31, 50...card body, 32...opening,
34... Wiring pattern, 35, 51... Probe needle, 35-1, 51-1... First node, 35-
2... Needle tip, 35-3, 51-2... Second node, 38... Wafer, 39... Semiconductor element, 4
0...Electrode part.

Claims

[Claims for Utility Model Registration] A card body in which a plurality of electrode parts are arranged facing a semiconductor element formed in a peripheral part of the center of the card body;
In this probe card, the probe card is provided with a plurality of probe needles that are fixed to the card body and whose tips come into contact with and detach from the electrode portions, and the probe needles are arranged so that their tips are directed outward from the center of the surface of the semiconductor element. A probe card characterized by being bent.