JPS6367237U - - Google Patents
Info
- Publication number
- JPS6367237U JPS6367237U JP16166086U JP16166086U JPS6367237U JP S6367237 U JPS6367237 U JP S6367237U JP 16166086 U JP16166086 U JP 16166086U JP 16166086 U JP16166086 U JP 16166086U JP S6367237 U JPS6367237 U JP S6367237U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- stage
- electron beam
- beam lithography
- lithography apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16166086U JPS6367237U (enrdf_load_html_response) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16166086U JPS6367237U (enrdf_load_html_response) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367237U true JPS6367237U (enrdf_load_html_response) | 1988-05-06 |
Family
ID=31088181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16166086U Pending JPS6367237U (enrdf_load_html_response) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367237U (enrdf_load_html_response) |
-
1986
- 1986-10-22 JP JP16166086U patent/JPS6367237U/ja active Pending
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