JPS6366928A - 熱処理装置 - Google Patents

熱処理装置

Info

Publication number
JPS6366928A
JPS6366928A JP21099486A JP21099486A JPS6366928A JP S6366928 A JPS6366928 A JP S6366928A JP 21099486 A JP21099486 A JP 21099486A JP 21099486 A JP21099486 A JP 21099486A JP S6366928 A JPS6366928 A JP S6366928A
Authority
JP
Japan
Prior art keywords
jacket
boat
reaction tube
opening
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21099486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH044749B2 (enExample
Inventor
Toshinobu Yanase
柳瀬　年延
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21099486A priority Critical patent/JPS6366928A/ja
Publication of JPS6366928A publication Critical patent/JPS6366928A/ja
Publication of JPH044749B2 publication Critical patent/JPH044749B2/ja
Granted legal-status Critical Current

Links

JP21099486A 1986-09-08 1986-09-08 熱処理装置 Granted JPS6366928A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21099486A JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21099486A JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Publications (2)

Publication Number Publication Date
JPS6366928A true JPS6366928A (ja) 1988-03-25
JPH044749B2 JPH044749B2 (enExample) 1992-01-29

Family

ID=16598567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21099486A Granted JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Country Status (1)

Country Link
JP (1) JPS6366928A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291931A (ja) * 1988-09-29 1990-03-30 Tel Sagami Ltd 縦型熱処理装置
JPH02290490A (ja) * 1989-04-28 1990-11-30 Toshiba Ceramics Co Ltd 縦型熱処理炉
WO1993023713A1 (fr) * 1992-05-15 1993-11-25 Shin-Etsu Quartz Products Co., Ltd. Appareil de traitement thermique a disposition verticale et materiau thermo-isolant

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291931A (ja) * 1988-09-29 1990-03-30 Tel Sagami Ltd 縦型熱処理装置
JPH02290490A (ja) * 1989-04-28 1990-11-30 Toshiba Ceramics Co Ltd 縦型熱処理炉
WO1993023713A1 (fr) * 1992-05-15 1993-11-25 Shin-Etsu Quartz Products Co., Ltd. Appareil de traitement thermique a disposition verticale et materiau thermo-isolant

Also Published As

Publication number Publication date
JPH044749B2 (enExample) 1992-01-29

Similar Documents

Publication Publication Date Title
JPS6366927A (ja) 熱処理装置
JPH03224217A (ja) 熱処理装置及び熱処理方法
US5318633A (en) Heat treating apparatus
JPS6366928A (ja) 熱処理装置
JP3110316B2 (ja) 外部燃焼酸化装置
JPS62206826A (ja) 半導体熱処理装置
US5753046A (en) Vertical diffusion furnace and cap therefor
US5445522A (en) Combustion device
JP3450033B2 (ja) 熱処理装置
JPH02130925A (ja) 縦型加圧酸化装置
JP2001210603A (ja) 縦型熱処理装置用の反応管および該反応管を用いた縦型熱処理装置
JP4718054B2 (ja) 縦型熱処理装置
JPS6341028A (ja) 酸化膜形成方法
JPS61290713A (ja) 処理装置
JP3388810B2 (ja) 半導体製造装置
JP2992576B2 (ja) 縦型熱処理装置
JPS6343316A (ja) 半導体装置の製造装置
JP2000269152A (ja) 半導体製造装置
JPH09260363A (ja) 半導体製造装置
JPS62128524A (ja) 多重構造の反応管を持つ縦型半導体熱処理装置
JPH0572132U (ja) 半導体製造装置
JPH03194924A (ja) 縦型処理装置
JPH0468522A (ja) 縦型熱処理装置
JPH04269823A (ja) 熱処理装置
JP2879047B2 (ja) 熱処理装置及び熱処理方法