JPS6366768B2 - - Google Patents

Info

Publication number
JPS6366768B2
JPS6366768B2 JP58234638A JP23463883A JPS6366768B2 JP S6366768 B2 JPS6366768 B2 JP S6366768B2 JP 58234638 A JP58234638 A JP 58234638A JP 23463883 A JP23463883 A JP 23463883A JP S6366768 B2 JPS6366768 B2 JP S6366768B2
Authority
JP
Japan
Prior art keywords
silicon carbide
gas
compound
plasma flame
methylhydrogensilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58234638A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60127213A (ja
Inventor
Minoru Takamizawa
Haruo Okamoto
Motoyuki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP58234638A priority Critical patent/JPS60127213A/ja
Publication of JPS60127213A publication Critical patent/JPS60127213A/ja
Publication of JPS6366768B2 publication Critical patent/JPS6366768B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP58234638A 1983-12-12 1983-12-12 超微粒子状炭化けい素の製造方法 Granted JPS60127213A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58234638A JPS60127213A (ja) 1983-12-12 1983-12-12 超微粒子状炭化けい素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58234638A JPS60127213A (ja) 1983-12-12 1983-12-12 超微粒子状炭化けい素の製造方法

Publications (2)

Publication Number Publication Date
JPS60127213A JPS60127213A (ja) 1985-07-06
JPS6366768B2 true JPS6366768B2 (show.php) 1988-12-22

Family

ID=16974163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58234638A Granted JPS60127213A (ja) 1983-12-12 1983-12-12 超微粒子状炭化けい素の製造方法

Country Status (1)

Country Link
JP (1) JPS60127213A (show.php)

Also Published As

Publication number Publication date
JPS60127213A (ja) 1985-07-06

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