JPS6365883B2 - - Google Patents

Info

Publication number
JPS6365883B2
JPS6365883B2 JP57231640A JP23164082A JPS6365883B2 JP S6365883 B2 JPS6365883 B2 JP S6365883B2 JP 57231640 A JP57231640 A JP 57231640A JP 23164082 A JP23164082 A JP 23164082A JP S6365883 B2 JPS6365883 B2 JP S6365883B2
Authority
JP
Japan
Prior art keywords
pattern
signal
copper foil
light
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57231640A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59125009A (ja
Inventor
Moritoshi Ando
Kikuo Mita
Giichi Kakigi
Jushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP23164082A priority Critical patent/JPS59125009A/ja
Publication of JPS59125009A publication Critical patent/JPS59125009A/ja
Publication of JPS6365883B2 publication Critical patent/JPS6365883B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP23164082A 1982-12-29 1982-12-29 パタ−ン検知法 Granted JPS59125009A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23164082A JPS59125009A (ja) 1982-12-29 1982-12-29 パタ−ン検知法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23164082A JPS59125009A (ja) 1982-12-29 1982-12-29 パタ−ン検知法

Publications (2)

Publication Number Publication Date
JPS59125009A JPS59125009A (ja) 1984-07-19
JPS6365883B2 true JPS6365883B2 (OSRAM) 1988-12-19

Family

ID=16926661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23164082A Granted JPS59125009A (ja) 1982-12-29 1982-12-29 パタ−ン検知法

Country Status (1)

Country Link
JP (1) JPS59125009A (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610615B2 (ja) * 1985-10-15 1994-02-09 キヤノン株式会社 多方向距離測定装置
JPH07104138B2 (ja) * 1991-01-28 1995-11-13 松下電工株式会社 プリント配線板のパターン幅測定方法
US5764365A (en) 1993-11-09 1998-06-09 Nova Measuring Instruments, Ltd. Two-dimensional beam deflector
IL107549A (en) 1993-11-09 1996-01-31 Nova Measuring Instr Ltd Device for measuring the thickness of thin films
IL123575A (en) * 1998-03-05 2001-08-26 Nova Measuring Instr Ltd Method and apparatus for alignment of a wafer
JP4722244B2 (ja) 1998-07-14 2011-07-13 ノバ・メジャリング・インストルメンツ・リミテッド 所定のフォトリソグラフィ工程に従って基板を加工する装置
US6212961B1 (en) 1999-02-11 2001-04-10 Nova Measuring Instruments Ltd. Buffer system for a wafer handling system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453562A (en) * 1977-10-05 1979-04-26 Canon Inc Photoelectric detector

Also Published As

Publication number Publication date
JPS59125009A (ja) 1984-07-19

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