JPS6365882B2 - - Google Patents
Info
- Publication number
- JPS6365882B2 JPS6365882B2 JP57162408A JP16240882A JPS6365882B2 JP S6365882 B2 JPS6365882 B2 JP S6365882B2 JP 57162408 A JP57162408 A JP 57162408A JP 16240882 A JP16240882 A JP 16240882A JP S6365882 B2 JPS6365882 B2 JP S6365882B2
- Authority
- JP
- Japan
- Prior art keywords
- beams
- prism
- axicon
- phase
- wavefront
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 13
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 description 13
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 238000005305 interferometry Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP81109873A EP0079981B1 (de) | 1981-11-25 | 1981-11-25 | Phasen-Symmetrisierung optischer Wellenflächen |
EP81109873.0 | 1981-11-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5890110A JPS5890110A (ja) | 1983-05-28 |
JPS6365882B2 true JPS6365882B2 (US07576130-20090818-C00114.png) | 1988-12-19 |
Family
ID=8188030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57162408A Granted JPS5890110A (ja) | 1981-11-25 | 1982-09-20 | 干渉装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4541720A (US07576130-20090818-C00114.png) |
EP (1) | EP0079981B1 (US07576130-20090818-C00114.png) |
JP (1) | JPS5890110A (US07576130-20090818-C00114.png) |
DE (1) | DE3174649D1 (US07576130-20090818-C00114.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2712691B1 (fr) * | 1993-11-19 | 1995-12-22 | Bernard Fondeur | Dispositif de mesure par interférométrie laser. |
US5604592A (en) * | 1994-09-19 | 1997-02-18 | Textron Defense Systems, Division Of Avco Corporation | Laser ultrasonics-based material analysis system and method using matched filter processing |
US5923426A (en) * | 1997-07-24 | 1999-07-13 | Mirage Development, Ltd. | Bi-lateral shearing interferometer |
KR100397166B1 (ko) * | 2001-06-18 | 2003-09-13 | 손광현 | 재귀반사체 |
US9223227B2 (en) | 2011-02-11 | 2015-12-29 | Asml Netherlands B.V. | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2627609A1 (de) * | 1976-06-19 | 1977-12-29 | Ibm Deutschland | Interferometrisches verfahren |
DE2636498C2 (de) * | 1976-08-13 | 1979-02-01 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur interferometrischen Oberflächenmessiing |
DE3020022A1 (de) * | 1980-05-24 | 1981-12-03 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren und einrichtung zur pruefung optischer abbildungssysteme |
-
1981
- 1981-11-25 EP EP81109873A patent/EP0079981B1/de not_active Expired
- 1981-11-25 DE DE8181109873T patent/DE3174649D1/de not_active Expired
-
1982
- 1982-09-20 JP JP57162408A patent/JPS5890110A/ja active Granted
- 1982-11-19 US US06/442,950 patent/US4541720A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS5890110A (ja) | 1983-05-28 |
EP0079981A1 (de) | 1983-06-01 |
DE3174649D1 (en) | 1986-06-19 |
US4541720A (en) | 1985-09-17 |
EP0079981B1 (de) | 1986-05-14 |
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