JPS6364892B2 - - Google Patents

Info

Publication number
JPS6364892B2
JPS6364892B2 JP56061709A JP6170981A JPS6364892B2 JP S6364892 B2 JPS6364892 B2 JP S6364892B2 JP 56061709 A JP56061709 A JP 56061709A JP 6170981 A JP6170981 A JP 6170981A JP S6364892 B2 JPS6364892 B2 JP S6364892B2
Authority
JP
Japan
Prior art keywords
laser
silicon
diffusion layer
reflection coefficient
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56061709A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57176719A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56061709A priority Critical patent/JPS57176719A/ja
Publication of JPS57176719A publication Critical patent/JPS57176719A/ja
Publication of JPS6364892B2 publication Critical patent/JPS6364892B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/00

Landscapes

  • Recrystallisation Techniques (AREA)
JP56061709A 1981-04-23 1981-04-23 Manufacture of semiconductor device Granted JPS57176719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56061709A JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56061709A JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57176719A JPS57176719A (en) 1982-10-30
JPS6364892B2 true JPS6364892B2 (en:Method) 1988-12-14

Family

ID=13179023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56061709A Granted JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57176719A (en:Method)

Also Published As

Publication number Publication date
JPS57176719A (en) 1982-10-30

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