JPS6364892B2 - - Google Patents
Info
- Publication number
- JPS6364892B2 JPS6364892B2 JP56061709A JP6170981A JPS6364892B2 JP S6364892 B2 JPS6364892 B2 JP S6364892B2 JP 56061709 A JP56061709 A JP 56061709A JP 6170981 A JP6170981 A JP 6170981A JP S6364892 B2 JPS6364892 B2 JP S6364892B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- silicon
- diffusion layer
- reflection coefficient
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P34/00—
Landscapes
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56061709A JPS57176719A (en) | 1981-04-23 | 1981-04-23 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56061709A JPS57176719A (en) | 1981-04-23 | 1981-04-23 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57176719A JPS57176719A (en) | 1982-10-30 |
| JPS6364892B2 true JPS6364892B2 (en:Method) | 1988-12-14 |
Family
ID=13179023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56061709A Granted JPS57176719A (en) | 1981-04-23 | 1981-04-23 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57176719A (en:Method) |
-
1981
- 1981-04-23 JP JP56061709A patent/JPS57176719A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57176719A (en) | 1982-10-30 |
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