JPS6364734B2 - - Google Patents
Info
- Publication number
- JPS6364734B2 JPS6364734B2 JP13467081A JP13467081A JPS6364734B2 JP S6364734 B2 JPS6364734 B2 JP S6364734B2 JP 13467081 A JP13467081 A JP 13467081A JP 13467081 A JP13467081 A JP 13467081A JP S6364734 B2 JPS6364734 B2 JP S6364734B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mass spectrometer
- pressure
- pump
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000006835 compression Effects 0.000 claims description 8
- 238000007906 compression Methods 0.000 claims description 8
- 239000012491 analyte Substances 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 40
- 239000001307 helium Substances 0.000 description 25
- 229910052734 helium Inorganic materials 0.000 description 25
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 20
- 150000002500 ions Chemical class 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 8
- 238000005086 pumping Methods 0.000 description 7
- -1 helium ions Chemical class 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13467081A JPS5835434A (ja) | 1981-08-26 | 1981-08-26 | リ−クデテクタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13467081A JPS5835434A (ja) | 1981-08-26 | 1981-08-26 | リ−クデテクタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5835434A JPS5835434A (ja) | 1983-03-02 |
| JPS6364734B2 true JPS6364734B2 (zh) | 1988-12-13 |
Family
ID=15133810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13467081A Granted JPS5835434A (ja) | 1981-08-26 | 1981-08-26 | リ−クデテクタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5835434A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2190204B (en) * | 1986-05-09 | 1990-10-17 | Boc Group Plc | Improvement in leak detectors |
| DE3722069A1 (de) * | 1986-08-21 | 1988-02-25 | Toyoda Gosei Kk | Signalhornschaltvorrichtung fuer ein steuerrad |
| DE3775213D1 (de) * | 1987-03-27 | 1992-01-23 | Leybold Ag | Lecksuchgeraet und betriebsverfahren dazu. |
| US5317900A (en) * | 1992-10-02 | 1994-06-07 | The Lyle E. & Barbara L. Bergquist Trust | Ultrasensitive helium leak detector for large systems |
-
1981
- 1981-08-26 JP JP13467081A patent/JPS5835434A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5835434A (ja) | 1983-03-02 |
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