JPS6363895B2 - - Google Patents

Info

Publication number
JPS6363895B2
JPS6363895B2 JP7512783A JP7512783A JPS6363895B2 JP S6363895 B2 JPS6363895 B2 JP S6363895B2 JP 7512783 A JP7512783 A JP 7512783A JP 7512783 A JP7512783 A JP 7512783A JP S6363895 B2 JPS6363895 B2 JP S6363895B2
Authority
JP
Japan
Prior art keywords
file
data
mark
hole
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7512783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59200236A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58075127A priority Critical patent/JPS59200236A/ja
Publication of JPS59200236A publication Critical patent/JPS59200236A/ja
Publication of JPS6363895B2 publication Critical patent/JPS6363895B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP58075127A 1983-04-28 1983-04-28 座標デ−タの区分けフアイル方法 Granted JPS59200236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58075127A JPS59200236A (ja) 1983-04-28 1983-04-28 座標デ−タの区分けフアイル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58075127A JPS59200236A (ja) 1983-04-28 1983-04-28 座標デ−タの区分けフアイル方法

Publications (2)

Publication Number Publication Date
JPS59200236A JPS59200236A (ja) 1984-11-13
JPS6363895B2 true JPS6363895B2 (enExample) 1988-12-08

Family

ID=13567217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58075127A Granted JPS59200236A (ja) 1983-04-28 1983-04-28 座標デ−タの区分けフアイル方法

Country Status (1)

Country Link
JP (1) JPS59200236A (enExample)

Also Published As

Publication number Publication date
JPS59200236A (ja) 1984-11-13

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