JPS6361125U - - Google Patents
Info
- Publication number
- JPS6361125U JPS6361125U JP15588286U JP15588286U JPS6361125U JP S6361125 U JPS6361125 U JP S6361125U JP 15588286 U JP15588286 U JP 15588286U JP 15588286 U JP15588286 U JP 15588286U JP S6361125 U JPS6361125 U JP S6361125U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- introduction pipe
- semiconductor substrate
- oxidation furnace
- hydrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 8
- 229910001882 dioxygen Inorganic materials 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 230000003647 oxidation Effects 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15588286U JPS6361125U (enExample) | 1986-10-09 | 1986-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15588286U JPS6361125U (enExample) | 1986-10-09 | 1986-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361125U true JPS6361125U (enExample) | 1988-04-22 |
Family
ID=31076985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15588286U Pending JPS6361125U (enExample) | 1986-10-09 | 1986-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361125U (enExample) |
-
1986
- 1986-10-09 JP JP15588286U patent/JPS6361125U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6361125U (enExample) | ||
| JPS63199135U (enExample) | ||
| JPS62116541U (enExample) | ||
| JPS6430330U (enExample) | ||
| JPS60149132U (ja) | 半導体熱処理炉 | |
| JPS6327469U (enExample) | ||
| JPS6111942U (ja) | 水素燃焼酸化装置 | |
| JPS59119031U (ja) | 拡散装置 | |
| JPS6033434U (ja) | 拡散炉 | |
| JPS59185828U (ja) | 半導体製造装置 | |
| JPS6245826U (enExample) | ||
| JPS6310549U (enExample) | ||
| JPS59109777U (ja) | 原料ガス供給装置 | |
| JPS6322600U (enExample) | ||
| JPS63106766U (enExample) | ||
| JPS62118916U (enExample) | ||
| JPS61142859U (enExample) | ||
| JPS5860543A (ja) | 半導体ウエハ処理装置 | |
| JPS6222823U (enExample) | ||
| JPS62203272U (enExample) | ||
| JPS6139937U (ja) | 拡散炉型気相成長装置 | |
| JPS6190240U (enExample) | ||
| JPS5337930A (en) | Seathed heater | |
| JPS6196540U (enExample) | ||
| JPH0171442U (enExample) |