JPS6359140U - - Google Patents
Info
- Publication number
- JPS6359140U JPS6359140U JP15322986U JP15322986U JPS6359140U JP S6359140 U JPS6359140 U JP S6359140U JP 15322986 U JP15322986 U JP 15322986U JP 15322986 U JP15322986 U JP 15322986U JP S6359140 U JPS6359140 U JP S6359140U
- Authority
- JP
- Japan
- Prior art keywords
- guide
- cart
- controller
- power supply
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15322986U JPS6359140U (enrdf_load_stackoverflow) | 1986-10-06 | 1986-10-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15322986U JPS6359140U (enrdf_load_stackoverflow) | 1986-10-06 | 1986-10-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6359140U true JPS6359140U (enrdf_load_stackoverflow) | 1988-04-20 |
Family
ID=31071924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15322986U Pending JPS6359140U (enrdf_load_stackoverflow) | 1986-10-06 | 1986-10-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6359140U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003502248A (ja) * | 1999-06-21 | 2003-01-21 | エスアールアイ インターナショナル | 摩擦のない輸送装置および方法 |
-
1986
- 1986-10-06 JP JP15322986U patent/JPS6359140U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003502248A (ja) * | 1999-06-21 | 2003-01-21 | エスアールアイ インターナショナル | 摩擦のない輸送装置および方法 |
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