JPS6356556U - - Google Patents
Info
- Publication number
- JPS6356556U JPS6356556U JP15082086U JP15082086U JPS6356556U JP S6356556 U JPS6356556 U JP S6356556U JP 15082086 U JP15082086 U JP 15082086U JP 15082086 U JP15082086 U JP 15082086U JP S6356556 U JPS6356556 U JP S6356556U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- characteristic
- analysis
- height
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 4
- 238000005211 surface analysis Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082086U JPH0511642Y2 (OSRAM) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082086U JPH0511642Y2 (OSRAM) | 1986-09-30 | 1986-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6356556U true JPS6356556U (OSRAM) | 1988-04-15 |
| JPH0511642Y2 JPH0511642Y2 (OSRAM) | 1993-03-23 |
Family
ID=31067307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15082086U Expired - Lifetime JPH0511642Y2 (OSRAM) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511642Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011243487A (ja) * | 2010-05-20 | 2011-12-01 | Hitachi Ltd | 荷電粒子線装置 |
| WO2012093474A1 (ja) * | 2011-01-05 | 2012-07-12 | Isobe Shinichiro | 多光源顕微鏡 |
-
1986
- 1986-09-30 JP JP15082086U patent/JPH0511642Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011243487A (ja) * | 2010-05-20 | 2011-12-01 | Hitachi Ltd | 荷電粒子線装置 |
| WO2012093474A1 (ja) * | 2011-01-05 | 2012-07-12 | Isobe Shinichiro | 多光源顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511642Y2 (OSRAM) | 1993-03-23 |
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