JPS6356556U - - Google Patents

Info

Publication number
JPS6356556U
JPS6356556U JP15082086U JP15082086U JPS6356556U JP S6356556 U JPS6356556 U JP S6356556U JP 15082086 U JP15082086 U JP 15082086U JP 15082086 U JP15082086 U JP 15082086U JP S6356556 U JPS6356556 U JP S6356556U
Authority
JP
Japan
Prior art keywords
sample
characteristic
analysis
height
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15082086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511642Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15082086U priority Critical patent/JPH0511642Y2/ja
Publication of JPS6356556U publication Critical patent/JPS6356556U/ja
Application granted granted Critical
Publication of JPH0511642Y2 publication Critical patent/JPH0511642Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP15082086U 1986-09-30 1986-09-30 Expired - Lifetime JPH0511642Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15082086U JPH0511642Y2 (OSRAM) 1986-09-30 1986-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15082086U JPH0511642Y2 (OSRAM) 1986-09-30 1986-09-30

Publications (2)

Publication Number Publication Date
JPS6356556U true JPS6356556U (OSRAM) 1988-04-15
JPH0511642Y2 JPH0511642Y2 (OSRAM) 1993-03-23

Family

ID=31067307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15082086U Expired - Lifetime JPH0511642Y2 (OSRAM) 1986-09-30 1986-09-30

Country Status (1)

Country Link
JP (1) JPH0511642Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011243487A (ja) * 2010-05-20 2011-12-01 Hitachi Ltd 荷電粒子線装置
WO2012093474A1 (ja) * 2011-01-05 2012-07-12 Isobe Shinichiro 多光源顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011243487A (ja) * 2010-05-20 2011-12-01 Hitachi Ltd 荷電粒子線装置
WO2012093474A1 (ja) * 2011-01-05 2012-07-12 Isobe Shinichiro 多光源顕微鏡

Also Published As

Publication number Publication date
JPH0511642Y2 (OSRAM) 1993-03-23

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