JPS6355857B2 - - Google Patents

Info

Publication number
JPS6355857B2
JPS6355857B2 JP58005263A JP526383A JPS6355857B2 JP S6355857 B2 JPS6355857 B2 JP S6355857B2 JP 58005263 A JP58005263 A JP 58005263A JP 526383 A JP526383 A JP 526383A JP S6355857 B2 JPS6355857 B2 JP S6355857B2
Authority
JP
Japan
Prior art keywords
temperature
bulb
halogen
air
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58005263A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59132118A (ja
Inventor
Tatsumi Hiramoto
Tetsuharu Arai
Hiroshi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP58005263A priority Critical patent/JPS59132118A/ja
Publication of JPS59132118A publication Critical patent/JPS59132118A/ja
Publication of JPS6355857B2 publication Critical patent/JPS6355857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P10/00—

Landscapes

  • Furnace Details (AREA)
JP58005263A 1983-01-18 1983-01-18 光照射装置 Granted JPS59132118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58005263A JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58005263A JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Publications (2)

Publication Number Publication Date
JPS59132118A JPS59132118A (ja) 1984-07-30
JPS6355857B2 true JPS6355857B2 (OSRAM) 1988-11-04

Family

ID=11606338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58005263A Granted JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Country Status (1)

Country Link
JP (1) JPS59132118A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0462048U (OSRAM) * 1990-10-02 1992-05-27

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001082348A1 (en) * 2000-04-20 2001-11-01 Tokyo Electron Limited Thermal processing system
KR20080080113A (ko) * 2005-11-11 2008-09-02 디에스지 테크놀로지스 열처리 시스템, 열처리 부품 및 열처리 방법
JP6094605B2 (ja) * 2015-01-20 2017-03-15 トヨタ自動車株式会社 単結晶製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0462048U (OSRAM) * 1990-10-02 1992-05-27

Also Published As

Publication number Publication date
JPS59132118A (ja) 1984-07-30

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