JPS6355429U - - Google Patents

Info

Publication number
JPS6355429U
JPS6355429U JP14829086U JP14829086U JPS6355429U JP S6355429 U JPS6355429 U JP S6355429U JP 14829086 U JP14829086 U JP 14829086U JP 14829086 U JP14829086 U JP 14829086U JP S6355429 U JPS6355429 U JP S6355429U
Authority
JP
Japan
Prior art keywords
substrates
cassette
chamber
stock
introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14829086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14829086U priority Critical patent/JPS6355429U/ja
Publication of JPS6355429U publication Critical patent/JPS6355429U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP14829086U 1986-09-27 1986-09-27 Pending JPS6355429U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14829086U JPS6355429U (cs) 1986-09-27 1986-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14829086U JPS6355429U (cs) 1986-09-27 1986-09-27

Publications (1)

Publication Number Publication Date
JPS6355429U true JPS6355429U (cs) 1988-04-13

Family

ID=31062418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14829086U Pending JPS6355429U (cs) 1986-09-27 1986-09-27

Country Status (1)

Country Link
JP (1) JPS6355429U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010219281A (ja) * 2009-03-17 2010-09-30 Tokyo Electron Ltd 基板処理システム及び基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010219281A (ja) * 2009-03-17 2010-09-30 Tokyo Electron Ltd 基板処理システム及び基板処理方法

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