JPS6354774A - 化合物半導体装置の製造方法 - Google Patents
化合物半導体装置の製造方法Info
- Publication number
- JPS6354774A JPS6354774A JP19735886A JP19735886A JPS6354774A JP S6354774 A JPS6354774 A JP S6354774A JP 19735886 A JP19735886 A JP 19735886A JP 19735886 A JP19735886 A JP 19735886A JP S6354774 A JPS6354774 A JP S6354774A
- Authority
- JP
- Japan
- Prior art keywords
- film
- melting point
- high melting
- point metal
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 150000001875 compounds Chemical class 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000002844 melting Methods 0.000 claims abstract description 35
- 230000008018 melting Effects 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 238000000137 annealing Methods 0.000 claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 18
- 238000005468 ion implantation Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 230000004913 activation Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 abstract description 8
- 229910052721 tungsten Inorganic materials 0.000 abstract description 8
- 239000010937 tungsten Substances 0.000 abstract description 8
- -1 tungsten nitride Chemical class 0.000 abstract description 6
- 230000002159 abnormal effect Effects 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 4
- 238000001020 plasma etching Methods 0.000 abstract description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract description 2
- 230000001681 protective effect Effects 0.000 description 18
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 239000003870 refractory metal Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19735886A JPS6354774A (ja) | 1986-08-25 | 1986-08-25 | 化合物半導体装置の製造方法 |
| US07/688,711 US5187111A (en) | 1985-09-27 | 1991-04-23 | Method of manufacturing Schottky barrier gate FET |
| US07/941,151 US5405792A (en) | 1985-09-27 | 1992-09-04 | Method of manufacturing schottky barrier gate type fet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19735886A JPS6354774A (ja) | 1986-08-25 | 1986-08-25 | 化合物半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6354774A true JPS6354774A (ja) | 1988-03-09 |
| JPH0260215B2 JPH0260215B2 (enrdf_load_stackoverflow) | 1990-12-14 |
Family
ID=16373154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19735886A Granted JPS6354774A (ja) | 1985-09-27 | 1986-08-25 | 化合物半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6354774A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142681A (ja) * | 1986-12-04 | 1988-06-15 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果トランジスタの製造方法 |
| US6639316B1 (en) | 1999-02-18 | 2003-10-28 | The Furukawa Electric Co., Ltd. | Electrode having substrate and surface electrode components for a semiconductor device |
-
1986
- 1986-08-25 JP JP19735886A patent/JPS6354774A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63142681A (ja) * | 1986-12-04 | 1988-06-15 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果トランジスタの製造方法 |
| US6639316B1 (en) | 1999-02-18 | 2003-10-28 | The Furukawa Electric Co., Ltd. | Electrode having substrate and surface electrode components for a semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260215B2 (enrdf_load_stackoverflow) | 1990-12-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |