JPS6350289Y2 - - Google Patents
Info
- Publication number
- JPS6350289Y2 JPS6350289Y2 JP1986096819U JP9681986U JPS6350289Y2 JP S6350289 Y2 JPS6350289 Y2 JP S6350289Y2 JP 1986096819 U JP1986096819 U JP 1986096819U JP 9681986 U JP9681986 U JP 9681986U JP S6350289 Y2 JPS6350289 Y2 JP S6350289Y2
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- ion plating
- evaporated
- discharge tube
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 25
- 230000008020 evaporation Effects 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 11
- 238000007733 ion plating Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 5
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096819U JPS6350289Y2 (US06650917-20031118-M00005.png) | 1986-06-26 | 1986-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096819U JPS6350289Y2 (US06650917-20031118-M00005.png) | 1986-06-26 | 1986-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637158U JPS637158U (US06650917-20031118-M00005.png) | 1988-01-18 |
| JPS6350289Y2 true JPS6350289Y2 (US06650917-20031118-M00005.png) | 1988-12-23 |
Family
ID=30963018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986096819U Expired JPS6350289Y2 (US06650917-20031118-M00005.png) | 1986-06-26 | 1986-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350289Y2 (US06650917-20031118-M00005.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990685A (US06650917-20031118-M00005.png) * | 1972-12-29 | 1974-08-29 |
-
1986
- 1986-06-26 JP JP1986096819U patent/JPS6350289Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990685A (US06650917-20031118-M00005.png) * | 1972-12-29 | 1974-08-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS637158U (US06650917-20031118-M00005.png) | 1988-01-18 |
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