JPS6347070Y2 - - Google Patents
Info
- Publication number
- JPS6347070Y2 JPS6347070Y2 JP3095781U JP3095781U JPS6347070Y2 JP S6347070 Y2 JPS6347070 Y2 JP S6347070Y2 JP 3095781 U JP3095781 U JP 3095781U JP 3095781 U JP3095781 U JP 3095781U JP S6347070 Y2 JPS6347070 Y2 JP S6347070Y2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- thin film
- frequency
- piezoelectric thin
- zno
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims 1
- 238000005452 bending Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000942 Elinvar Inorganic materials 0.000 description 1
- -1 Erinva Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3095781U JPS6347070Y2 (en, 2012) | 1981-03-06 | 1981-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3095781U JPS6347070Y2 (en, 2012) | 1981-03-06 | 1981-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57143722U JPS57143722U (en, 2012) | 1982-09-09 |
| JPS6347070Y2 true JPS6347070Y2 (en, 2012) | 1988-12-06 |
Family
ID=29828423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3095781U Expired JPS6347070Y2 (en, 2012) | 1981-03-06 | 1981-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347070Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6288412A (ja) * | 1985-10-14 | 1987-04-22 | Murata Mfg Co Ltd | 圧電振動子 |
-
1981
- 1981-03-06 JP JP3095781U patent/JPS6347070Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57143722U (en, 2012) | 1982-09-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4533934B2 (ja) | 振動片及び振動子の製造方法 | |
| EP0097692A1 (en) | PIEZOELECTRIC SPEAKER COUPLED TO RESONANCE STRUCTURES. | |
| GB2141231A (en) | Force sensors | |
| JPH08186467A (ja) | 拡がり振動型圧電振動子およびその製造方法 | |
| JP5266437B2 (ja) | 水晶振動子と水晶ユニットと水晶発振器の各製造方法 | |
| JPH10112898A (ja) | 圧電型電気音響変換器 | |
| JPS6347070Y2 (en, 2012) | ||
| JPH10173476A (ja) | 音叉型圧電振動子 | |
| JPS6347071Y2 (en, 2012) | ||
| JP2009236885A (ja) | 角速度検出振動片の製造方法 | |
| JPH0821828B2 (ja) | 縦水晶振動子 | |
| JPS5856404B2 (ja) | 水晶トランスデュサ | |
| JPH11146491A (ja) | 電気機械変換部品 | |
| JPH0150134B2 (en, 2012) | ||
| JPH07155688A (ja) | 無音振動型警報器 | |
| JPS59224500A (ja) | 圧電フアン | |
| JPS58173912A (ja) | 圧電体屈曲振動子および圧電フィルタ | |
| JPH01227515A (ja) | 圧電振動子 | |
| JP2000332573A (ja) | 圧電振動子 | |
| JPS59175777A (ja) | バイモルフ振動子の駆動方法 | |
| JPH10173477A (ja) | 音叉型圧電振動子 | |
| JP5099385B2 (ja) | 振動片及び振動子 | |
| JPS6255500A (ja) | 圧電フアン | |
| JPS596370B2 (ja) | 力変換機構 | |
| JPH0831759B2 (ja) | 縦水晶振動子 |