JPS6346473U - - Google Patents

Info

Publication number

JPS6346473U

JPS6346473U JP13955686U JP13955686U JPS6346473U JP S6346473 U JPS6346473 U JP S6346473U JP 13955686 U JP13955686 U JP 13955686U JP 13955686 U JP13955686 U JP 13955686U JP S6346473 U JPS6346473 U JP S6346473U

Authority

JP

Japan

Prior art keywords

substrate

vapor phase

phase synthesis

utility

model registration

Prior art date

1986-09-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 12
• 230000015572 biosynthetic process Effects 0.000 claims description 5
• 239000002178 crystalline material Substances 0.000 claims description 5
• 238000003786 synthesis reaction Methods 0.000 claims description 5
• 239000012808 vapor phase Substances 0.000 claims description 5
• 239000000463 material Substances 0.000 claims description 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
• 229910052799 carbon Inorganic materials 0.000 claims description 3
• 238000001308 synthesis method Methods 0.000 description 3
• 239000013078 crystal Substances 0.000 description 2
• 239000012159 carrier gas Substances 0.000 description 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000012495 reaction gas Substances 0.000 description 1