JPH0160533U - - Google Patents

Info

Publication number
JPH0160533U
JPH0160533U JP15529987U JP15529987U JPH0160533U JP H0160533 U JPH0160533 U JP H0160533U JP 15529987 U JP15529987 U JP 15529987U JP 15529987 U JP15529987 U JP 15529987U JP H0160533 U JPH0160533 U JP H0160533U
Authority
JP
Japan
Prior art keywords
reaction tube
cvd apparatus
vertical cvd
reaction chamber
internal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15529987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530357Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15529987U priority Critical patent/JPH0530357Y2/ja
Publication of JPH0160533U publication Critical patent/JPH0160533U/ja
Application granted granted Critical
Publication of JPH0530357Y2 publication Critical patent/JPH0530357Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15529987U 1987-10-09 1987-10-09 Expired - Lifetime JPH0530357Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15529987U JPH0530357Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15529987U JPH0530357Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Publications (2)

Publication Number Publication Date
JPH0160533U true JPH0160533U (enrdf_load_stackoverflow) 1989-04-17
JPH0530357Y2 JPH0530357Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=31432805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15529987U Expired - Lifetime JPH0530357Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Country Status (1)

Country Link
JP (1) JPH0530357Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002280310A (ja) * 2001-03-19 2002-09-27 Tokyo Electron Ltd 縦型熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002280310A (ja) * 2001-03-19 2002-09-27 Tokyo Electron Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0530357Y2 (enrdf_load_stackoverflow) 1993-08-03

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