JPS61191474U - - Google Patents

Info

Publication number
JPS61191474U
JPS61191474U JP7561585U JP7561585U JPS61191474U JP S61191474 U JPS61191474 U JP S61191474U JP 7561585 U JP7561585 U JP 7561585U JP 7561585 U JP7561585 U JP 7561585U JP S61191474 U JPS61191474 U JP S61191474U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth apparatus
bell gear
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7561585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047189Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985075615U priority Critical patent/JPH047189Y2/ja
Publication of JPS61191474U publication Critical patent/JPS61191474U/ja
Application granted granted Critical
Publication of JPH047189Y2 publication Critical patent/JPH047189Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985075615U 1985-05-21 1985-05-21 Expired JPH047189Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985075615U JPH047189Y2 (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985075615U JPH047189Y2 (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Publications (2)

Publication Number Publication Date
JPS61191474U true JPS61191474U (enrdf_load_stackoverflow) 1986-11-28
JPH047189Y2 JPH047189Y2 (enrdf_load_stackoverflow) 1992-02-26

Family

ID=30617000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985075615U Expired JPH047189Y2 (enrdf_load_stackoverflow) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPH047189Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223571A (en) * 1975-08-19 1977-02-22 Toshiba Corp Vapor phase reaction apparatus
JPS599083U (ja) * 1982-07-07 1984-01-20 東芝機械株式会社 気相成長装置
JPS5983031U (ja) * 1982-11-27 1984-06-05 東芝機械株式会社 縦型気相成長装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223571A (en) * 1975-08-19 1977-02-22 Toshiba Corp Vapor phase reaction apparatus
JPS599083U (ja) * 1982-07-07 1984-01-20 東芝機械株式会社 気相成長装置
JPS5983031U (ja) * 1982-11-27 1984-06-05 東芝機械株式会社 縦型気相成長装置

Also Published As

Publication number Publication date
JPH047189Y2 (enrdf_load_stackoverflow) 1992-02-26

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